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Shape Evolution of Faceted Silicon Nanocrystals upon Thermal Annealing in an Oxide Matrix
Published online by Cambridge University Press: 18 July 2013
Abstract
It is well established that controlled high-temperature annealing of hydrogen silsesquioxane leads to the formation of small spherical silicon nanocrystals (∼3 nm). The present study outlines an investigation into the influence of annealing time and temperature. After prolonged annealing, crystal surfaces thermodynamically self-optimize to form a variety of faceted structures (e.g., cubic, truncated trigonal and hexagonal structures).
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- MRS Online Proceedings Library (OPL) , Volume 1536: Symposium A – Film Silicon Science and Technology , 2013 , pp. 207 - 212
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- Copyright © Materials Research Society 2013
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