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Simulation Studies of TiN PVD and CVD Thin Films for Contact/Via Liners
Published online by Cambridge University Press: 15 February 2011
Abstract
TiN PVD and CVD models have been incorporated in the SPEEDIE topography simulator. A parameter extraction methodology is presented which allows engineers to locally calibrate their process to the SPEEDIE simulator. The calibration requires no special equipment or modifications to the PVD or CVD equipment. Parameter extraction is demonstrated with Applied Materials deposition equipment.
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- Research Article
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- Copyright © Materials Research Society 1995
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