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Site controlled nucleation of ferroelectric crystals: a step towards lithography modulated self-assembly

Published online by Cambridge University Press:  01 February 2011

P. Muralt ,
S. Bühlmann  and
S. Von Allmen
P. Muralt
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, Lausanne, Switzerland
S. Bühlmann
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, Lausanne, Switzerland
S. Von Allmen
Affiliation:
Ceramics Laboratory, Swiss Federal Institute of Technology EPFL, Lausanne, Switzerland
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Abstract

An additive technique for the growth of PZT crystallites in the sub-200 nm range on predefined sites is presented. The method is based on nucleation promotion by TiO2 seeds. Epitaxial (111)-oriented Pt on a SrTiO3 single crystal served as substrate. TiO2 seed sites have been defined by an e-beam lithographic process. The initial Pb flux determines whether (100) or (111) crystallites are obtained. Best results have been obtained with PZT(100) yielding one square grain per site with a narrow size distribution (120 to 150 nm). In this case, the seed collected additional PbO adatoms reaching the seed by diffusion. The sidewalls consist mostly of {110} facets. A model in the frame of classical nucleation theory describes well experimental observations. The piezoelectric response and the ferroelectric switching of the structures have been verified.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 784: Symposium C – Ferroelectric Thin Films XII , 2003 , C1.6.
Copyright
Copyright © Materials Research Society 2004

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