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Spatially-Resolved Emission Profiles of Parallel Plate RF Glow Discharges

Published online by Cambridge University Press:  25 February 2011

Richard M. Roth
Richard M. Roth*
Affiliation:
Amoco Corporation, Corporate Research, P.O. Box 400, Naperville, IL 60566
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Abstract

An apparatus is described which can acquire, in less than a second, a spectrally-resolved, spatial profile of the light emitted from a parallel plate, rf glow discharge. This is achieved by imaging the discharge emission onto the entrance slit of a monochromator with its spatial integrity preserved. Then a spatially-resolved image is detected by an optical multichannel detector which is oriented parallel to the entrance slit. Spatial profiles from nonreactive gas discharges demonstrate that the symmetry of an rf discharge can be dramatically affected by the nature of the gas.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 98: Symposium K – Plasma Processing and Synthesis of Materials II , 1987 , 209
Copyright
Copyright © Materials Research Society 1987

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References

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