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Strain in Epitaxial BaTiO3 Thin Films Prepared by MOCVD
Published online by Cambridge University Press: 10 February 2011
Abstract
The microstrain in epitaxial BaTiO3 thin films has been investigated using x-ray diffraction. The full width half maximum of the (001) diffraction peaks ranged from 0.12 to 0.49 deg. From the analysis of the angular dependence of the diffraction peak broadening, it is concluded that the broadening is due predominantly to strain. The magnitude of the microstrain decreases sharply with increasing film thickness.
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- Copyright © Materials Research Society 1999
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