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Structure and Kinetics Study of MOCVD Lead Oxide (PbO) from Lead BIS-Tetramethylheptadionate (Pb(thd)2)

Published online by Cambridge University Press:  15 February 2011

Warren C. Hendricks ,
Seshu B. Desu  and
Ching Yi Tsai
Warren C. Hendricks
Affiliation:
Department of Materials Science and Engineering, Virginia Polytechnic Institute & State University, Blacksburg, VA 24061
Seshu B. Desu
Affiliation:
Department of Materials Science and Engineering, Virginia Polytechnic Institute & State University, Blacksburg, VA 24061
Ching Yi Tsai
Affiliation:
Department of Materials Science and Engineering, Virginia Polytechnic Institute & State University, Blacksburg, VA 24061
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Abstract

Lead bis-tetramethylheptadionate (Pb(thd)2) is an extremely useful precursor for the preparation of lead-based thin films such as PZT, lead titanate, etc. In this paper, lead oxide was deposited from Pb(thd)2 in a hot-walled CVD reactor using oxygen as a reactive species and diluent gas. XRD and SEM were used to determine the structure of the material deposited by the CVD process. The CVD process consistently produced the monoxide of lead which was found to consist of a mixture of orthorhombic PbO with small tetragonal PbO platelets. TEM was used to determine the orientation of the individual platelets which was found to be consistently normal to the <201> family of zone axes. Deposition rates were determined and simulated using an FEM computer model to determine the rate constants for the overall deposition process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 335: Symposium Y – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics , 1993 , 215
Copyright
Copyright © Materials Research Society 1994

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