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The Structure of Hydrogenated Amorphous Silicon-Carbon Alloys as Investigated by Exafs

Published online by Cambridge University Press:  21 February 2011

S. Pascarelli ,
F. Boscherini ,
S. Mobilio  and
F. Evangelisti
S. Pascarelli
Affiliation:
INFN, Laboratori Nazionali di Frascati, P.O. Box 13, I-00044 Frascati (Roma), Italy.
F. Boscherini
Affiliation:
INFN, Laboratori Nazionali di Frascati, P.O. Box 13, I-00044 Frascati (Roma), Italy.
S. Mobilio
Affiliation:
INFN, Laboratori Nazionali di Frascati, P.O. Box 13, I-00044 Frascati (Roma), Italy. Dipartimento di Energetica, Universita dell'Aquila, Roio Monteluco, L'Aquila, Italy.
F. Evangelisti
Affiliation:
Dip. di Fisica, Universita “La Sapienza”, Piazzale Aldo Moro 2, 1–00185 Roma, Italy.
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Abstract

We have studied the local structure of hydrogenated amorphous silicon-carbon alloy films, a-Si1−xCx:H, by measuring the extended x-ray absorption fine-structure (EXAFS) at the Si K edge.

We find that first coordination shell average bond lengths are 2.35 Å for Si-Si and 1.86 Å for Si-C and are constant with concentration to within × 0.015 Å.

By comparing the composition of the first coordination shell around Si with the average concentration we show that the alloy tends to be chemically ordered, in that heteroatomic bonds are preferred.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 219: Symposium A – Amorphous Silicon Technology - 1991 , 1991 , 283
Copyright
Copyright © Materials Research Society 1991

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References

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