Hostname: page-component-77c89778f8-n9wrp Total loading time: 0 Render date: 2024-07-18T22:32:53.164Z Has data issue: false hasContentIssue false
  • English
  • Français

Studies Of The Polymer Thin Film Glass Transition Temperature Monitored With The Complex Viscoelastic Cofficients

Published online by Cambridge University Press:  10 February 2011

C. C. White  and
W. L. Wu
C. C. White
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD 20899
W. L. Wu
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD 20899
Get access

Abstract

In integrated circuit manufacturing, the gaps between metal lines are a critical parameter, and polymer films are being evaluated as low k dielectric materials for VLSI. Desire to maximize the number of elements within a given area to increase clock speed and decrease power consumption have forced the gaps to become increasingly smaller. Currently, 0.25–0.18 micron line widths are the subject of much commercial interest. A line width of 0.25 microns is within a factor of 5 of the molecular dimension of most commercial polymers. Experiments have suggested polymer films slightly smaller than these dimensions may not have the expected bulk mechanical properties. This deviation from the expected behavior (i.e., Change in the glass transition temperature) would present significant technical challenges to the manufacturing and reliability of integrated circuits. These effects are extremely difficult to determine experimentally with requisite precision. Recently, an experimental technique, based on a highly modified quartz crystal microbalance, has been developed to study the mechanical properties of these ultra-thin polymer films with high precision. The experimental details and preliminary results from this recently developed state-of-the-art experimental technique will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 543: Symposium W – Dynamics in Small Confining Systems IV , 1998 , 175
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. The National Technology Roadmap for Semiconductors., 1998, SematechGoogle Scholar
2. Frank, C. W., etal., Science, 1996. 273(16 August): p. 912–915.Google Scholar
3. Forrest, J. A., Dalnoki-Veress, K., and Dutcher, J. R., Phys. Rev. Lett., 1996. 77(10): p. 2002.Google Scholar
4. Forrest, J.A., Dalnoki-Veress, K., and Dutcher, J. R., Phys. Rev. E., 1997.56: p. 5707.Google Scholar
5. Mason, W. P, Physical Acoustics and the Properties of Solids. 1958, New York: D. Van Nostrand Company. Google Scholar
6. Mason, W. P., Piezoelectric Crystals and Their Application to Ultrasonics. 1950, New York: D. Van Nostrand Company.Google Scholar
7. Ferry, J. D., Viscoelastic Properties of Polymers. 3rd ed. 1980, New York: John Wiley and Sons, Inc.Google Scholar
8. Fretigny, C. and Basire, C., J. Appl. Phys., 1997. 82(1): p. 43.Google Scholar
9. Kajiyama, T., Tanaka, K., and Takahara, A., Macromolecules, 1997. 30: p. 280.Google Scholar
10. Nwankwo, E. and Durning, C. J., Rev. of Sci. Instrum., 1998. 69(6): p. 2375.Google Scholar
11. Okahata, Y. and Ebato, H., Analytical Chemistry, 1989. 61: p. 2185.Google Scholar
12. Kutzner, H., Luckham, P., and Rennie, J., FARADAY DIS., 1996. 104: p. 9–16.Google Scholar
13. Bordarier, P., Schoen, M., and Fuchs, A., PHYS. REV. E, 1998. 57(2): p. 1621–1635.Google Scholar
14. Domke, J. and Radmacher, M., Langmuir, 1998. 14: p. 3320–3325.Google Scholar
15. Koltover, I., etal., JOURNAL DE PHYSIQUE II, 1996. 6(6): p. 893–907.Google Scholar
16. Cho, Y., Cai, L., and Granick, S., TRIBOLOGY INTERNATIONAL, 1997. 30(12): p. 889–894.Google Scholar
17. White, C., Ph.D. Thesis, 1994, University of Wisconsin-Madison.Google Scholar
18. White, C. C. and Schrag, J. L., In press: J. Chem. Phys, 1998.Google Scholar
19. Hillier, A.C. and Ward, M. D., Anal. Chem., 1992. 64: p. 2539–54.Google Scholar
20. Brandup, J. and Immergut, E. H., Polymer Handbook. 2nd ed. 1975, New York: Wiley.Google Scholar
21. Wallace, W. E., van-Zanten, J. H., and Wu, W. L., Phys. Rev. E., 1995. 52: p. R33299.Google Scholar