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Surface Analysis Of Lcd Materials iN Various Stages of Production by Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS)
Published online by Cambridge University Press: 15 February 2011
Extract
Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a surface analysis technique which provides a sensitive characterization of the elemental and molecular composition of the near-surface region (top few monolayers) of solid materials1. This mass spectrometry technique can also localize the distribution of specific elements, molecules or molecular fragments at submicrometer (µm) lateral resolutions.2
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- Copyright © Materials Research Society 1994
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