Hostname: page-component-7bb8b95d7b-fmk2r Total loading time: 0 Render date: 2024-10-03T06:22:22.285Z Has data issue: false hasContentIssue false
  • English
  • Français

Surface and bulk properties of boride/nitride nanoscale films

Published online by Cambridge University Press:  10 February 2011

R. A. Adrievski
R. A. Adrievski*
Affiliation:
Institute for New Chemical Problems, Russian Academy of Sciences, Chemogolovka, Moscow Region, 142432, Russia
Get access

Abstract

Nanoscale TiB2/TiN films have been prepared by d.c. and r.f. magnetron non-reactive sputtering and examined by TEM, SAED, SEM, AES, XPS, XRD, AFM as well as nanoindentation. Attention has been focused on both bulk and surface physical-mechanical properties. The effect of the latter on the nanoindentaion test results seems to be very important. Two types of film fracture under a Vickers indentor connected with homogeneous and inhomogeneous deformation have been described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 501: Symposium FF – Surface Controlled Nanoscale Materials for High-Added… , 1997 , 149
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Andrevski, R.A., Kalinnikov, G.V., and Urbanovich, V.S., in Nanophase and Nanocomposite Materials II, edited by Komarneni, S., Parker, J.C., and Wollenberger, H.J. (Mater. Res. Soc. Proc. 457, Pittsburgh, PA, 1997) pp. 413–4 18.Google Scholar
2. Andrievski, R.A., J. Mater. Sci. 32, 4463 (1997).Google Scholar
3. Andrievski, R.A., Kalinnikov, G.V., Kobelev, N.P., Soifer, Ja.M., and Shtansky, D.V., Fiz. Tverd. Tela 39, 1859 (1997) [Rus. Phys.Solid State 39, 1661 (1997)].Google Scholar
4. Andrievski, R.A., in Nanostructured Materials: Science and Technology, edited by Chow, G.M. (Kluwer Academic Publishers, Dordrecht, 1998), in press.Google Scholar
5. Andrievski, R.A., Amanulla, S.A., Brookes, E.J., Kalinnikov, G.V., and Potafeev, A.F., Neorg. Mater. 31, 1600 (1995) [Rus. Inorg. Mater. 31, 1456 (1995)].Google Scholar
6. Murray, J.L., Liao, P.K., and Spear, K.E., Bull. Alloy Phase Diagr. 7, 550 (1986).Google Scholar
7. Lengauer, W., J. All. Comp. 186, 293 (1992).Google Scholar
8. Jonsson, B. and Hogmark, S., Thin Solid Films 114, 257 (1984).Google Scholar
9. Ma, K.J. and Bloyce, A., Surf. Eng. 11, 71 (1995).Google Scholar
10. Shiwa, M., Weppelmann, E., Munz, D., Swain, M.V., and Kishi, T., J. Mater. Sci. 31, 5985 (1996).Google Scholar
11. Donovan, P.E., J. Mater. Sci. 24, 523 (1989).Google Scholar
12. Glezer, A.M. and Molotilov, B.V., Structure and Mechanical Properties of Amorphous Alloys (Metallurgiya, Moscow, 1992) pp. 90–9 8 (in Russian).Google Scholar
13. Andrievski, R.A., J. Mater. Sci. 29, 614 (1994).Google Scholar
14. Suryanarayana, C., Int. Mater. Rev. 40, 41 (1995).Google Scholar
15. Mencik, J., Quandt, E., and Munz, D., Thin Solid Films 287, 208 (1996).Google Scholar
16. Barnet, S.A., in Physics of Thin Films. Mechanic and Dielectric Properties, edited by Fracombe, M.H. and Vossen, J.L. (Academic Press 17, New York, 1993) pp. 1–42.Google Scholar