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Surface Topography of Thin Au and Pd Films After Ion Bombardment Studied With STM

Published online by Cambridge University Press:  15 February 2011

K. P. Reimann ,
A. Rehmet ,
W. Bolse  and
U. Geyer
K. P. Reimann
Affiliation:
I. Physikalisches Institut and SFB 345, Universität Göttingen, Bunsenstr. 7-9, 37073 Göttingen, Germany, kreiman@gwdg.de
A. Rehmet
Affiliation:
I. Physikalisches Institut and SFB 345, Universität Göttingen, Bunsenstr. 7-9, 37073 Göttingen, Germany, kreiman@gwdg.de
W. Bolse
Affiliation:
II. Physikalisches Institut and SFB 345, Universität Göttingen, Bunsenstr. 3-5, 37073 Göttingen, Germany.
U. Geyer
Affiliation:
I. Physikalisches Institut and SFB 345, Universität Göttingen, Bunsenstr. 7-9, 37073 Göttingen, Germany, kreiman@gwdg.de
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Abstract

The changes in surface topography of thin metallic films during ion bombardment were investigated with STM. Pd and Au thin films, having defect-free, atomically flat areas over at least 300×300Å2 were bombarded with Ar+, Kr+, Xe+ ions. Ion energies and target temperatures were varied. The roughening after high fluence irradiation shows scaling with a roughness exponent 0.84. For 300 K target temperature we observe, both for Au and Pd, 3 D erosion, for 700 K, on the contrary, layer-by-layer erosion. The differences in erosion morphologies between Au and Pd surfaces are supposed to stem from differences in surface mobility of adatoms.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 439: Symposium B – Microstructure Evolution During Irradiation , 1996 , 361
Copyright
Copyright © Materials Research Society 1997

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References

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