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Techniques and Applications for Non-Planar Lithography

Published online by Cambridge University Press:  11 February 2011

John A. Rogers
John A. Rogers*
Affiliation:
Bell Laboratories, Lucent Technologies, Murray Hill, NJ 07974, U.S.A.
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Abstract

Certain classes of three dimensional nanostructures can be fabricated by contact printing patterns onto curved or non-flat surfaces. This paper reviews some of our work that demonstrates this approach by using microcontact printing to form a range of three dimensional structures with feature sizes as small as 1–2 microns and it demonstrates their use in a variety of functional devices. We also describe a nanotransfer printing technique with operational characteristics that are similar to those of microcontact printing but which enables nanometer resolution. High resolution replica molding techniques provide a method for producing copies of some of these printed structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 739: Symposium H – Three-Dimensional Nanoengineered Assemblies , 2002 , H1.2
Copyright
Copyright © Materials Research Society 2003

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References

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