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Texture Variations in Sol-Gel Derived PZT Films on Substrates with Platinum Metallization

Published online by Cambridge University Press:  15 February 2011

J.G.E. Gardeniers ,
M. Elwenspoek  and
C. Cobianu
J.G.E. Gardeniers
Affiliation:
MESA Research Institute, P.O. Box 217, NL-7500 AE Enschede, The Netherlands
M. Elwenspoek
Affiliation:
MESA Research Institute, P.O. Box 217, NL-7500 AE Enschede, The Netherlands
C. Cobianu
Affiliation:
Center of Microtechnology, Bucharest, Romania.
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Abstract

Metalorganic precursor solutions of composition Zr : Ti = 0.53 : 0.47 were used to spin-cast PZT layers on sputtered Pt films. After annealing at temperatures of 550 °C - 800 °C, the PZT films of tetragonal perovskite structure reproducibly showed different textures and surface morphologies, depending on whether or not a Ti layer was used as an adhesion layer for the Pt film. The texture differences were found to be independent of annealing treatment. It is argued that the observed texture differences are caused by a change in Pt-PZT interface composition, resulting from the diffusion of Ti into the Pt film during annealing; X-ray diffraction of an annealed Pt/Ti/SiO2/Si film combination provided evidence for a compound Pt3Ti. Annealing at 850 °C caused severe diffusion of Ti from the metal layer into the PZT film, leading to a tetragonal PZT layer with lattice constants corresponding to a Zr : Ti ratio of 30 : 70.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 343: Symposium H – Polycrystalline Thin Films - Structure, Texture, Properties and Applications , 1994 , 451
Copyright
Copyright © Materials Research Society 1994

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References

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