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A Theory for Multi Damage Evaluation of TiN Thin Film

Published online by Cambridge University Press:  21 March 2011

Kazunori Misawa ,
Tomonaga Okabe ,
Masaaki Yanaka ,
Masao Shimizu  and
Nobuo Takeda
Kazunori Misawa
Affiliation:
Department of Mechanical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 230, Japan
Tomonaga Okabe
Affiliation:
Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo, c/o Komaba Open Laboratory (KOL), Takeda Lab., 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904, Japan
Masaaki Yanaka
Affiliation:
Toppan Technical Research Institute, Sugito-machi, Kitakatsushika-gun, Saitama 345, Japan
Masao Shimizu
Affiliation:
Department of Mechanical Engineering, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 230, Japan
Nobuo Takeda
Affiliation:
Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo, c/o Komaba Open Laboratory (KOL), Takeda Lab., 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904, Japan
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Abstract

The present paper experimentally studies the cracking phenomena of a TiN thin film on a titanium alloy, and presents a new approach to predict the number of cracks under tensile load. An elastoplastic shear-lag model is developed to obtain the stress distribution caused by the film cracks, which is found to agree well with that calculated with FEM. The number of thin film cracks is predicted using a Monte Carlo simulation using the present approach, and favourably compared with the experimental results.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 653: Symposium Z – Multiscale Modeling of Materials-2000 , 2000 , Z7.10
Copyright
Copyright © Materials Research Society 2001

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References

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