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Thermal Properties of Thin Films
Published online by Cambridge University Press: 22 February 2011
Abstract
We summarize various measurements of the thermal conductivity of thin ceramic films which show that the thermal conductivity of thin films with thickness in the micron and sub-micron range may be up to two orders of magnitude lower than the thermal conductivityof the corresponding bulk solid. The reduction in the thin film effective thermal conductivity is attributed to the interfacial thermal resistance across the film/substrate interface.
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- Copyright © Materials Research Society 1993
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