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Thermal Stability Studies on 1, 3, 5, 7 - Tetramethylcyclotetra-Siloxane(TMCTS), a Low к CVD Precursor

Published online by Cambridge University Press:  01 February 2011

C. Xu ,
A. S. Borovik ,
Z. Wang ,
J. Arno  and
T. H. Baum
C. Xu
Affiliation:
ATMI, Inc., 7 Commerce Drive, Danbury, CT 06810, U.S.A. Email: cxu@atmi.com
A. S. Borovik
Affiliation:
ATMI, Inc., 7 Commerce Drive, Danbury, CT 06810, U.S.A. Email: cxu@atmi.com
Z. Wang
Affiliation:
ATMI, Inc., 7 Commerce Drive, Danbury, CT 06810, U.S.A. Email: cxu@atmi.com
J. Arno
Affiliation:
ATMI, Inc., 7 Commerce Drive, Danbury, CT 06810, U.S.A. Email: cxu@atmi.com
T. H. Baum
Affiliation:
ATMI, Inc., 7 Commerce Drive, Danbury, CT 06810, U.S.A. Email: cxu@atmi.com
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Abstract

Chemical studies on 1,3,5,7-tetramethylcyclotetrasiloxane (TMCTS) were conducted to elucidate its thermal behaviors with water and under various reaction conditions. TMCTS was heated in the presence of 316L stainless steel and in the presence of water. The heated TMCTS then was evaluated using 1H NMR (proton nuclear magnetic resonance) spectroscopy, GC-MS (gas chromatography-mass spectrometry) as a function of time, temperature and residual water concentration. The thermal degradation kinetics of gas-phase TMCTS were investigated using FTIR (Fourier transform infrared) spectroscopy at elevated temperatures. These initial results indicated that TMCTS degradation rates increased with both temperature and water concentration. This work spawned the development of a “dry” TMCTS that is expected to exhibit enhanced thermal stability relative towards uncontrolled decomposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 716: Symposium B – Silicon Materials-Processing, Characterization, and Reliability , 2002 , B12.8
Copyright
Copyright © Materials Research Society 2002

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