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Use of Advantageous Impurity Effects in Metallization
Published online by Cambridge University Press: 15 February 2011
Abstract
Impurities control electrical, mechanical, physical, and chemical properties of the materials. We have manipulated their introduction into semiconductors, insulators, and metals to achieve otherwise unattainable properties. More recently, the continued miniaturization of the solid state devices and circuits have challenged the existing interconnection and contact metallization materials and schemes. These have led to an investigation of new multilevel metallization schemes with lower resistivities and higher reliabilities. In addition, efforts are being made to re-examine the use of newer Al-alloys that may satisfy the resistivity and reliability requirements. This paper will briefly review the existing practices, future needs, and current research activities focused to satisfy these future needs.
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- Copyright © Materials Research Society 1996