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Use of Si-YBaCuO Intermixed System for Patterning of Superconducting Thin Films

Published online by Cambridge University Press:  28 February 2011

Q. Y. Ma ,
E. S. Yang ,
G. V. Treyz ,
C. Shu ,
R. M. Osgood Jr.  and
Chin-An Chang
Q. Y. Ma
Affiliation:
Microelectronics Sciences Laboratories and Center for Telecommunications Research, 1312 Mudd, Columbia University, New York, NY 10027
E. S. Yang
Affiliation:
Microelectronics Sciences Laboratories and Center for Telecommunications Research, 1312 Mudd, Columbia University, New York, NY 10027
G. V. Treyz
Affiliation:
Microelectronics Sciences Laboratories and Center for Telecommunications Research, 1312 Mudd, Columbia University, New York, NY 10027
C. Shu
Affiliation:
Microelectronics Sciences Laboratories and Center for Telecommunications Research, 1312 Mudd, Columbia University, New York, NY 10027
R. M. Osgood Jr.
Affiliation:
Microelectronics Sciences Laboratories and Center for Telecommunications Research, 1312 Mudd, Columbia University, New York, NY 10027
Chin-An Chang
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598
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Abstract

A Si-YBaCuO intermixed system has been formed using rapid thermal annealing (RTA) of Cu/BaO/Y2O2/Si layered structures, which were deposited on MgO substrates by electron-beam evaporation. The electrical and structural properties of the Si-YBaCuO system have been analyzed by resistivity, X-ray diffraction, scanning electron microscope, X-ray photoelectron spectroscopy and Auger depth profiling measurements. It was found that Si mixed with YBaCuO during annealing, thus creating an insulating film. This effect has been used to pattern YBaCuO films. The patterning process was carried out on an underlying silicon layer, rather than the YBaCuO film itself, using conventional photolithography or laser etching. After YBaCuO film deposition and RTA, the patterned region became superconducting separated by Si-YBaCuO intermixed areas. Micron-sized line features with Tc's above 77 K have been demonstrated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 169: Symposium M – High Temperature Superconductors: Fundamental Properties and Novel Materials Processing , 1989 , 1189
Copyright
Copyright © Materials Research Society 1990

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