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Visible and Infrared Emission from GaN:Er Thin Films Grown by Sputtering

Published online by Cambridge University Press:  03 September 2012

Hong Chen
Affiliation:
Department of Physics and Astronomy School of Electrical Engineering and Computer Science, Ohio University, Athens, OH 45701-2979
K. Gurumurugan
Affiliation:
Department of Physics and Astronomy School of Electrical Engineering and Computer Science, Ohio University, Athens, OH 45701-2979
M.E. Kordesch
Affiliation:
Department of Physics and Astronomy School of Electrical Engineering and Computer Science, Ohio University, Athens, OH 45701-2979
W.M. Jadwisienczak
Affiliation:
School of Electrical Engineering and Computer Science, Ohio University, Athens, OH 45701-2979kordesch@ohio.edu
H.J. Lozykowski
Affiliation:
School of Electrical Engineering and Computer Science, Ohio University, Athens, OH 45701-2979kordesch@ohio.edu
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Abstract

Erbium-doped films were grown on sapphire and silicon substrates by reactive sputtering, with different Er concentrations in the film. GaN films deposited at 800 K were determined to be polycrystalline by x-ray diffraction analysis, and retained their polycrystalline structure after annealing in nitrogen at 1250 K. The Er-doped films showed optical transmission beginning at about 360 nm, and the Er dose and film purity were determined with Rutherford backscattering spectroscopy. Photoluminescence and cathodoluminescence spectroscopy showed sharp emission lines corresponding to Er 3+ intra 4fn shell transitions over the range from 9 – 300 K. At above-bandgap optical and electron excitation, the 4S3/2 and 4F9/2 transition dominate, and are superposed on the “yellow band” emission. The infrared emission line at 1543 nm, corresponding to the Er 4I to 4I3/2 transition is also observed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

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References

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