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Void Formation in Thin Semiconducting Film Under Ion Implantation

Published online by Cambridge University Press:  15 February 2011

V. A. Zhikharev  and
F. R. Batyrshin
V. A. Zhikharev
Affiliation:
Zavoisky Physical Technical Institute, Kazan, 420029, RUSSIAN FEDERATION.
F. R. Batyrshin
Affiliation:
Zavoisky Physical Technical Institute, Kazan, 420029, RUSSIAN FEDERATION.
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Abstract

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 389: Symposium R – Modedling and Simulation of Thin-Film Processing , 1995 , 155
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1 Akhieser, I. A., Davidov, L. N.. Introduction in Theoretical Radiation Physics of Metal and Compounds. (Naukova dumka., Kiev, 1985 ), p. 142. Google Scholar
2 Zelensky, V.F., Nekludov, I M., Chernyaeva, T. P., Radiation Defects and Swelling of Metals. (Naukova dumka., Kiev, 1988 ), p.293. Google Scholar
3 Wang, L. M., Birtcher, R. C., Appl.Phys.Lett. 55, 2494 (1989); I.B Khaibullin, V.Yu. Petukhov, G.G. Zakirov, M.I. lbragirnova, Proc. Int.Conf.IIIBE, Sofia, 1990, p. 123; G.L. Destefanis, J.P. Gailliard, Appl.Phys.Lett. 36, 40 (1981).Google Scholar
4 Okimo, T., Yoshida, M., Japan.Appl.Phys. 28, 86 (1989).Google Scholar
5 Slezov, V.V., Fizika tverdogo tela 8, 20 (1989).Google Scholar
6 Chandrasekhar, S., Stochastic Problems in Physics and Astronomy, (Izd.Inostr.Lit., Moscow, 1947), .p. 168. Google Scholar
7 Mizuo, S., Higuchi, H., J.Electrochem. Soc. 129, 2292 (1982).Google Scholar