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Xps Study of CdTe Surface Layers: Effects of Hydrogen

Published online by Cambridge University Press:  28 February 2011

L Svob ,
D. Ballutaud ,
A. Heurtel  and
Y. Marfaing
L Svob
Affiliation:
Laboratoire de Physique des Solides de Bellevue, C.N.R.S., 1, Place Aristide Briand, F-92195 Meudon Principal Cedex, France
D. Ballutaud
Affiliation:
Laboratoire de Physique des Solides de Bellevue, C.N.R.S., 1, Place Aristide Briand, F-92195 Meudon Principal Cedex, France
A. Heurtel
Affiliation:
Laboratoire de Physique des Solides de Bellevue, C.N.R.S., 1, Place Aristide Briand, F-92195 Meudon Principal Cedex, France
Y. Marfaing
Affiliation:
Laboratoire de Physique des Solides de Bellevue, C.N.R.S., 1, Place Aristide Briand, F-92195 Meudon Principal Cedex, France
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Abstract

The effects of different hydrogen or equivalent deuterium treatments on CdTe superficiallayers are studied. Surface chemical analysis is performed by x-ray photoelectron spectroscopy and hydrogen profiles are controlled by secondary ion mass spectroscopy using deuterium. Hydrogen plasma etching leads to a clean and nearly stoichiometric surface, and the surface abrasion rate is higher than the hydrogen in-diffusion rate. Deuterium implantation by a Kaufman source leads to surface depleted of tellurium and prevents them from further oxidation. Annealing under deuterium gas produces a similar surface, free fromoxide, but not stable with regard to further oxidation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 138: Symposium Q – Characterization of the Structure and Chemistry of Defects in Materials , 1988 , 203
Copyright
Copyright © Materials Research Society 1989

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