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Aluminum Gate Metallization for AMLCDs
Published online by Cambridge University Press: 10 February 2011
Abstract
Aluminum metallization incorporating the anodic aluminum oxide has been optimized for high-performance amorphous silicon thin film transistors (a-Si:H TFTs). For such a device, the off-current is less than the picoampere and the ON-OFF current ratio is ∼2×107, the field effective mobility is about 1.25 cm /Vsec in the linear region and the subthreshold swing is about 0.38 V/decade. These electrical performances are acceptable for high-definition AMLCDs.
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- Copyright © Materials Research Society 1997
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