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Analysis of Stress Variations in Epitaxial Films Using Cathodoluminescence Microscopy and Spectroscopy
Published online by Cambridge University Press: 16 February 2011
Abstract
This paper presents experimental results of a new application of cathodoluminescence microscopy in the analysis of stress variations in epitaxial layers. Cathodoluminescence microscopy and spectroscopy techniques, in conjunction with the known behavior of the optical transitions in the presence of stress, can be effectively used for both the qualitative and quantitative analyses of spatial variations of stress in epitaxial films.
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- Copyright © Materials Research Society 1990
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