Article contents
Applications of Beam-Solid Interactions in Semiconductor Material and Device Processing
Published online by Cambridge University Press: 25 February 2011
Abstract
Pulsed or scanned energy beams have been shown to be very useful for many semiconductor applications, ranging from annealing of ion-implanted damage to preparation of materials. An overview of this important field is given and its prospects assessed.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1985
References
REFERENCES
- 3
- Cited by