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a-Si TFTs on Thin Steel Foil Substrates: How Thin Can We Go?
Published online by Cambridge University Press: 10 February 2011
Abstract
The mechanics of thin film-substrate couples indicates that mechanical stress in the active electronic layer can be reduced when films are deposited onto thinner substrates. To explore the question of just how thin a substrate can be, a-Si:H TFTs are fabricated on thin steel foil substrates of various thickness, and performance metrics from devices on each of the substrates are measured and compared.
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- Copyright © Materials Research Society 2000