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Atmospheric Pressure Chemical Vapor Deposition of Gallium Nitride Thin Films
Published online by Cambridge University Press: 25 February 2011
Abstract
The atmospheric-pressure chemical vapor deposition of gallium nitride films from hexakis(dimethylamido)digallium, Ga2(NMe2)6, and ammonia precursors at 200 °C with growth rates up to 1000 Å/min is described. The films were characterized by transmission electron microscopy, X-ray photoelectron spectroscopy and Rutherford backscattering spectrometry. Rutherford backscattering analysis showed that the N/Ga ratio was 1.12–1.17. The films were crystalline with ≃ 5–15 nm crystallites.
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- Copyright © Materials Research Society 1991
References
REFERENCES
5.
Manasevit, H. M., Herdmann, F. M., Simpson, W. I., J. Electrochem. Soc.
118, 1864 (1971).Google Scholar
8.
Fix, R. M., Gordon, R. G., Hoffman, D. M., Mater. Res. Soc. Symp. Proc.
168, 357 (1990).Google Scholar
16. GaN: Index No. 2–1078. Powder Diffraction File, editor-in-chief: McClune, W. F. (JCPDS International Centre for Diffraction Data, Swarthmore, PA 19081-2389, USA).Google Scholar
17.
Practical Surface Analysis, edited by Briggs, D., Seah, M.P. (John Wiley, New York, 1983), p. 498.Google Scholar
18.
Lappert, M. F., Power, P. P., Sanger, A. R., Srivastava, R. C., Metal and Metalloid Amides (John Wiley & Sons, New York, 1980), pp. 22–23 and Chapters 4-9.Google Scholar
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