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Beryllium-Based Multilayer Structures
Published online by Cambridge University Press: 15 February 2011
Abstract
Multilayer (ML) structures composed of Mo-Be, Ru-Be and Rh-Be with bilayer periods of - 6 nm have been grown using dc magnetron sputter deposition. The ML microstructure has been characterized using x-ray diffraction and high-resolution transmission electron microscopy, and the normal incidence reflectivity has been measured at soft x-ray wavelengths.
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- Copyright © Materials Research Society 1995
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