Article contents
Chemical Vapor Deposition of Strontium-Barium-Niobate
Published online by Cambridge University Press: 25 February 2011
Abstract
Spire Corporation has deposited strontium-barium-niobate by chemical vapor deposition at atmospheric pressure using Ba(TMHD), Sr(TMHD), and Nb ethoxide. Deposition temperature as 550°C in an isothermal furnace. Films were deposited upon silicon (precoated with silica), platinum, sapphire, and quartz. Materials were characterized by RBS, X-ray diffraction, EDS, electron, and optical microscopy. Electrical and optical properties were measured at Boston University.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1992
References
- 5
- Cited by