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Crystalline Polyimide Thin Film Deposition by Ionized Cluster Bean
Published online by Cambridge University Press: 25 February 2011
Abstract
Polyimide thin films are deposited by the ionized cluster beam deposition( ICBD ) technique. Polymerization and crystallization of polyimide were investigated using TEN, IR, and the electronic structure of the polyimide film was investigated using XPS. Films deposited at optimum ion acceleration voltage showed strong preferential crystal orientation. Crystalline polyimide film was obtained at ion acceleration voltage of 700 V.
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- Copyright © Materials Research Society 1990
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