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Degradation of Nano-crystalline ITO Films due to Exposure to Hyperthermal Atomic Oxygen

Published online by Cambridge University Press:  26 February 2011

Long Li ,
Ross Harder ,
Fengting Xu ,
Ian K. Robinson  and
Judith C. Yang
Long Li
Affiliation:
lil2@pitt.edu, University of Pittsburgh, MSE, 848 Benedum Hall, Pittsburgh, PA, 15261, United States, 412-6249753, 412-6248069
Ross Harder
Affiliation:
rharder@uiuc.edu, University of Illinois at Urbana-Champaign, Department of Physics, United States
Fengting Xu
Affiliation:
fex1@pitt.edu, University of Pittsburgh, Materials Science and Engineering Department, United States
Ian K. Robinson
Affiliation:
robinson1@mrl.uiuc.edu, University of Illinois at Urbana-Champaign, Department of Physics, United States
Judith C. Yang
Affiliation:
Jyang@engr.pitt.edu, University of Pittsburgh, Materials Science and Engineering Department, United States
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Abstract

Indium tin oxide (ITO) films coated on float glass slides were exposed to 5 eV hyperthermal atomic oxygen at room temperature with increasing fluences: 2×1019, 6×1019 and 2×1020 O-atoms/cm2. We characterized the structure of the ITO films after room temperature atomic oxygen exposure with scanning electron microscope (SEM) and atomic force microscope (AFM), synchrotron X-ray diffraction (XRD), and cross-sectional transmission electron microscope (X-TEM). The unexposed ITO films were found to possess a nano-crystalline surface, and clean and abrupt ITO/SiO2 interfaces without interfacial phase. Surface roughness of the exposed ITO films increased with the increasing AO influences. The interface- sensitive peaks in XRD measurements with grazing incidence revealed that the crystallinity of the ITO was modified near the interface. Cross-sectional TEM confirmed that many ITO particles with diameters ranging from 2-10 nm formed in the SiO2 substrate near the interface after AO exposure. These findings suggest that O atoms can travel through the ITO films, where the boundaries of columnar-grown grains may supply the pathway.

Keywords

oxideoxidationnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 887: Symposium Q – Degradation Processes in Nanostructured Materials , 2005 , 0887-Q10-08
Copyright
Copyright © Materials Research Society 2006

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References

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