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Design and Properties of a Thin-Film, Mems-Based Magnetostrictive Magnetometer

Published online by Cambridge University Press:  15 February 2011

T. J. Kistenmacher ,
R. Osiander ,
S. A. Ecelberger ,
R. B. Givens ,
D. K. Wickenden  and
J. C. Murphy
T. J. Kistenmacher
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
R. Osiander
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
S. A. Ecelberger
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
R. B. Givens
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
D. K. Wickenden
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
J. C. Murphy
Affiliation:
Applied Physics Laboratory, The Johns Hopkins University, Laurel, MD 20723–6099
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Abstract

The principles of operation of a MEMS-based magnetometer designed on the magnetoelastic effect are described. The active transduction element is a commercial (001) silicon microcantilever sputter coated with an amorphous thin film of the giant magnetostrictive alloy Terfenol-D [(Dy0.7Tb0.3)Fe2]. The easy axis of magnetization of the Terfenol-D film lies in the plane of the microcantilever and along the acicular direction. In addition to the magnetostrictive transducer, basic components include: (a) mechanical resonance of the coated-microcantilever through coupling to an ac magnetic field; and, (b) detection by optical beam deflection of the microcantilever motion utilizing a laser diode source and a position-sensitive detector. The sensitivity of this magnetostrictive magnetometer is currently 1 μT, which is three orders of magnitude better than a magnetometer based on a similar-sized piezoresistive cantilever.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 75
Copyright
Copyright © Materials Research Society 1997

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References

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