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Fabrication and Photoelectrical Properties of AZO/SiO2/p-Si Based Device

Published online by Cambridge University Press:  21 March 2011

Z.Q. Ma ,
B. He ,
J. Xu ,
L. Zhao ,
F. Li ,
N.S. Zhang ,
X. J. Meng ,
L. Shen  and
C. Shen
Z.Q. Ma
Affiliation:
SHU-SolarE PV Laboratory, Department of Physics, Shanghai University, Shanghai 200444, P.R.China
B. He
Affiliation:
SHU-SolarE PV Laboratory, Department of Physics, Shanghai University, Shanghai 200444, P.R.China
J. Xu
Affiliation:
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Hubei 430070, P. R. China
L. Zhao
Affiliation:
SHU-SolarE PV Laboratory, Department of Physics, Shanghai University, Shanghai 200444, P.R.China
F. Li
Affiliation:
SHU-SolarE PV Laboratory, Department of Physics, Shanghai University, Shanghai 200444, P.R.China
N.S. Zhang
Affiliation:
SHU-SolarE PV Laboratory, Department of Physics, Shanghai University, Shanghai 200444, P.R.China
X. J. Meng
Affiliation:
SHU-SolarE PV Laboratory, Department of Physics, Shanghai University, Shanghai 200444, P.R.China
L. Shen
Affiliation:
SHU-SolarE PV Laboratory, Department of Physics, Shanghai University, Shanghai 200444, P.R.China
C. Shen
Affiliation:
SHU-SolarE PV Laboratory, Department of Physics, Shanghai University, Shanghai 200444, P.R.China
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Abstract

In order to fabricate AZO/SiO2/p-Si heterojunction device and let it be an absorber of ultraviolet response cell. Zinc oxide (ZnO) thin films doped with aluminum (AZO) were deposited on p-Si(100) substrates covered with silicon dioxide (SiO2) by radio frequency magnetron sputtering. The optical and electrical properties of the Al doped - ZnO films were characterized by UV-VIS spectrophotometer, current-voltage measurement, and four point probe technique, respectively. The results show that the device is a typical tunneling diode for minority carrier and a strong obstructing effect from majority carriers. The potential rectifying behavior and photovoltaic characteristic is present at dark current and weak light illumination, respectively.

Keywords

PhotovoltaicOptical propertiesElectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1123: Symposium P – Photovoltaic Materials and Manufacturing Issues , 2008 , 1123-P05-14
Copyright
Copyright © Materials Research Society 2009

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