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Fabrication of Discrete Track Media with Patterned Servo-areas and Tracks on Disk Substrate
Published online by Cambridge University Press: 26 February 2011
Abstract
Discrete track media (DTM) with patterned servo-areas and recording tracks were fabricated on disk substrates in a two-step RIE process, creating a fine pattern transfer from an imprinted resist mask to a substrate surface without variations in groove depth. The fabricated DTM with perpendicular magnetic recording layers flew stably during read out signal detection.
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- Copyright © Materials Research Society 2008