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Fabrication of Lead Zirconate Titanate Thick Film Disks for Micro Transducer Devices

Published online by Cambridge University Press:  01 February 2011

Takashi Iijima ,
Sachiko Ito  and
Hirofumi Matsuda
Takashi Iijima
Affiliation:
Smart Structure Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1–1–1 Umezono, Tsukuba 305–8568, Japan
Sachiko Ito
Affiliation:
Smart Structure Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1–1–1 Umezono, Tsukuba 305–8568, Japan
Hirofumi Matsuda
Affiliation:
Smart Structure Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 2, 1–1–1 Umezono, Tsukuba 305–8568, Japan
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Abstract

A combination of the preparation techniques for the ferroelectric films and the micro machining of Si is considered to be an effective way to fabricate microelectromechanical systems (MEMS), such as piezoelectric micro-transducer devices for the electrical and medical fields. In this study, 10-μm-thick disk shape lead zirconate titanate (PZT) thick films were successfully fabricated using a chemical solution deposition (CSD) process. Pt top electrode and PZT layer were etched by reactive ion etching (RIE) process, and 100 to 500-μm-diameter PZT micro disks were fabricated on Pt/SiO2/Si substrate. The relative dielectric constant, dissipation factor, remnant polarization and coercive field were εr = 1130, tanδ = 0.02, Pr = 14 μC/cm2 and Ec = 25 kV/cm, respectively. This means that the ferroelectric and dielectric properties of the PZT micro disks were comparable with that of the bulk PZT ceramics. The PZT micro disk showed the butterfly-shaped displacement curve, related with piezoelectric response, in the case of bipolar measurement. The piezoelectric constant of the PZT disks poled at 80Vfor 10 min was estimated to be AFM d33 = 221 pm/V. A resonance frequency of the radial oscillation was evaluated to apply for micro transducer devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 785: Symposium D – Materials and Devices for Smart Systems , 2003 , D4.5
Copyright
Copyright © Materials Research Society 2004

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References

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