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The Fabrication of Stainless Steel Parts for MEMs

Published online by Cambridge University Press:  15 March 2011

Terry J. Garino ,
Alfredo Morales ,
Thomas Buchheit  and
Brad Boyce
Terry J. Garino
Affiliation:
Ceramic Materials and Tribology, Mechanics and Melting Departments Sandia National Laboratories Albuquerque, NM 87185-1411, U.S.A.
Alfredo Morales
Affiliation:
Microsystems Processing Department, Sandia National Laboratories Livermore, CA 94550, U.S.A.
Thomas Buchheit
Affiliation:
Tribology, Mechanics and Melting Departments Sandia National Laboratories Albuquerque, NM 87185-1411, U.S.A.
Brad Boyce
Affiliation:
Tribology, Mechanics and Melting Departments Sandia National Laboratories Albuquerque, NM 87185-1411, U.S.A.
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Abstract

A micro-molding process was used to fabricate parts in the 0.1 to 10 mm size range from a stainless steel nano-powder. The two types of molds used were both produced from parts fabricated using the LIGA process so that they had precise dimensional tolerance and straight sidewalls. Rigid PMMA molds were made by injection molding and flexible silicone rubber molds were made by casting. Mold filling was accomplished by mixing the powder with epoxy to form a putty-like material that was then pressed into the mold cavities and allowed to cure. After pyrolysis of the epoxy, the parts were sintered in forming gas. The densification kinetics were measured in situ using a video system. Full densification was achieved after 1 hour at 1350°. The microstructure of the sintered parts was examined using the SEM. The mechanical strength, hardness, dimensional tolerance and surface roughness of the sintered parts were also measured.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B5.19
Copyright
Copyright © Materials Research Society 2002

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