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Focused Ion Beam Fabrication of Individual Carbon Nanotube Devices

Published online by Cambridge University Press:  01 February 2011

Lee Chow  and
Guangyu Chai
Lee Chow
Affiliation:
chow@ucf.edu, University of Central Florida, Physics, 4000 Central Florida Blvd., Orlando, FL, 32816-2385, United States, 407-823-2333, 407-823-5112
Guangyu Chai
Affiliation:
Guangyuchai@gmail.com, Apollo Technologies Inc., Orlando, FL, 32750, United States
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Abstract

Focused ion beam (FIB) techniques have found many applications in nanoscience and nanotechnology applications in recent years. However, not much work has been done using FIB to fabricate carbon nanotube devices. This is mainly due to the fact that carbon nanotubes are very fragile and energetic ion beam from FIB can easily damage the carbon nanotubes. Here we report the fabrication of carbon nanotube (CNT) devices, including electron field emitters, atomic force microscope tips, and nano-pores for biomedical applications. This is made possible by a unique, coaxial configuration consisting of a CNT embedded in a graphitic carbon coating, which was developed by us for FIB processing of carbon nanotubes. The CNT-based atomic force microscope tip has been demonstrated. The electron field emission from the tip and the side wall of CNT will be discussed. We will also report the fabrication of a multiwall carbon nanotube nanopore for future applications.

Keywords

ion-beam processingdevicesfield emission
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1020: Symposium GG – Ion-Beam-Based Nanofabrication , 2007 , 1020-GG08-01
Copyright
Copyright © Materials Research Society 2007

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