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Friction Measurement in MEMS Using a New Test Structure

Published online by Cambridge University Press:  10 February 2011

B.T. Crozier ,
M.P. de Boer ,
J.M. Redmond ,
D.F. Bahr  and
T.A. Michalske
B.T. Crozier
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164
M.P. de Boer
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87111
J.M. Redmond
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87111
D.F. Bahr
Affiliation:
Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164
T.A. Michalske
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87111
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Abstract

A MEMS test structure capable of measuring friction between polysilicon surfaces under a variety of test conditions has been refined from previous designs. The device is applied here to measuring friction coefficients of polysilicon surfaces under different environmental, loading, and surface conditions. Two methods for qualitatively comparing friction coefficients (µ) using the device are presented. Samples that have been coated with a self-assembled monolayer of the lubricating film perfluorinated-decyltrichlorosilane (PFTS) have a coefficient of friction that is approximately one-half that of samples dried using super-critical CO2 (SCCO2) drying. Qualitative results indicate that µ is independent of normal pressure. Wear is shown to increase µ for both supercritically dried samples and PFTS coated samples, though the mechanisms appear to be different. Super critically dried surfaces appear to degrade continuously with increased wear cycles, while PFTS coated samples reach a steady state friction value after about 105 cycles.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 129
Copyright
Copyright © Materials Research Society 2000

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