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High Resolution Electron Microscopy Study of As-Prepared and Annealed Tungsten-Carbon Nultilayers

Published online by Cambridge University Press:  21 February 2011

Tai D. Nguyen ,
Ronald Gronsky  and
Jeffrey B. Kortright
Tai D. Nguyen
Affiliation:
Center for X-ray Optics, Accelerator and Fusion Research Division, Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
Ronald Gronsky
Affiliation:
National Center for Electron Microscopy, Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
Jeffrey B. Kortright
Affiliation:
Center for X-ray Optics, Accelerator and Fusion Research Division, Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
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Abstract

A series of sputtered tungsten-carbon multilayer structures with periods ranging from 2 to 12 nm in the as-prepared state and after annealing at 500°C for 4 hours has been studied with high resolution transmission electron microscopy. The evolution with annealing of the microstructure of these multilayers depends on their period. As-prepared structures appear predominantly amorphous from TEM imaging and diffraction. Annealing results in crystallization of the W-rich layers into WC in the larger period samples, and less complete or no crystallization in the smaller period samples. X-ray scattering reveals that annealing expands the period in a systematic way. The layers remain remarkably well-defined after annealing under these conditions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 139: Symposium R – High Resolution Microscopy of Materials , 1989 , 357
Copyright
Copyright © Materials Research Society 1989

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References

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