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Homogeneous Al-Ti and Al-Ti-Si Thin Alloy Films
Published online by Cambridge University Press: 26 February 2011
Abstract
The microstructure and properties of thin films depends strongly upon the alloy composition. A study was made of the metallurgical aspects of homogeneous Al alloy films, particularly the binary Al-Ti and the ternary Al-Ti-Si systems. Electrical resistivity, grain size morphology, second phase formation and electromigration have been studied as a function of the alloy composition and its heat treatment.
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- Copyright © Materials Research Society 1986
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