Hostname: page-component-5c6d5d7d68-pkt8n Total loading time: 0 Render date: 2024-08-10T05:53:15.139Z Has data issue: false hasContentIssue false

Innovative Curriculum on Electronic Materials Processing and Engingeering

Published online by Cambridge University Press:  15 March 2011

Jane P. Chang*
Affiliation:
Departiment of Chemical Engineering, University of California. Los Angels, CA
Get access

Extract

Recognizing that the traditional engineering education training is often inadequate in preparing the students for the challanges presented by this industry's dynamic environment and insufficient to meet the empoyer's criteria in hiring new engineers, a new curriculum on Semiconductor Manufacturing is instituted in the Chemical Engineering Department at UCLA to train the students in various scientific and technologica areas that are pertinenet to the microelectronics industries. This paper describes this new mutidisciplinary curriculum that provides knowledge and skills in semiconductor manufacturing through a series ofcourses that emphasize on the application of fundamenta engineeering disciplines in solid-state physics, materials science of semiconductors, and chemical processing. The curriculum comprises three major components:(1)a comprehensive course curriculum in semiconductor manufacturing; (2) a laboratory for hands-on training in semiconductor device fabrication; (3) design of experiments. The capstone laboratory course is designed to strengthen students’ training in “unit operatins” used in semicounductor manufacturing and allow them to practice engineering principles using the state-of-the-art experimental setup. It comprises the most comprehensive training(seven photolithographic steps and numero0us chemical processes)in fabricating and testing complementary metal-oxide-semiconductor (CMOS) devices. This curriculum is recentyaccredited by the Accreditation Board for Engineering and Technology(ABET).

Type
Research Article
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. University of Arizona, Department of Chemical Engineering, ChE415 Micro Electronics Manufacturing.Google Scholar
2. , S.S.Dang, , R.A.Matthes, and , C.G. Takoudis, “A Web-Based Course in the Dundamentals of Microelectronics Processing”, Chemical engineering Education, 34(4), 350 (2000)Google Scholar
2. , A.J.Muscat, , E..Allen, and , E.D.H. Green, “Interdisciplinary Teaching and Learning in a Semiconductor Processing Course”, Journal of engineering Education,87(4), 413 (1998)Google Scholar
4. NSF Engineering Online News, Learn to Make Your own Semiconductor Device, November 2000, at http://www.eng.nsf.gov/engnews/2000/00-24SemiconductorDevice/00-24semiconductordevice.htm.Google Scholar