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Integrated Optic Devices in Silicon and Silicon-on-Insulator Materials

Published online by Cambridge University Press:  10 February 2011

B. Schüppert  and
K. Petermann
B. Schüppert
Affiliation:
Technische Universität Berlin, Fachgebiet Hochfrequenztechnik Einsteinufer 25, D-10587 Berlin, Germany - schue@sun6hft.ee.tu-berlin.de
K. Petermann
Affiliation:
Technische Universität Berlin, Fachgebiet Hochfrequenztechnik Einsteinufer 25, D-10587 Berlin, Germany - schue@sun6hft.ee.tu-berlin.de
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Abstract

This paper reviews various integrated optics techniques and devices in the silicon material system. Different approaches for waveguides, passive and active components in silicon and the performance of such devices will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 486: Symposium H – Materials & Devices for Silicon Based Optoelectronics , 1997 , 33
Copyright
Copyright © Materials Research Society 1998

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