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Kinetic Monte Carlo Simulation of Dynamic Phenomena in thin Film Growth
Published online by Cambridge University Press: 10 February 2011
Abstract
In this paper we describe the response of a Kinetic Monte Carlo model to time-varying growth conditions. We vary temperature and partial pressure sinusoidally and identify behavior typical of low-dimensional nonlinear systems. In particular, the frequency content of the roughness response is sensitive to the presence of steps in the surface.
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- Copyright © Materials Research Society 2000
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