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Laser Direct Writing of Aluminum
Published online by Cambridge University Press: 26 February 2011
Abstract
We report, for the first time, laser direct writing of high conductivity aluminum interconnects from dimethylaluminum hydride (DMALH). These lines were deposited from a metallorganic gas with a focused deep-UV laser beam and were directly connected to aluminum test structures. Electrical measurements and Auger electron spectroscopy were used to characterize the laser deposited films.
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- Copyright © Materials Research Society 1998
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