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Laser-Induced Formation of Thin Silicone Layers with High Purity

Published online by Cambridge University Press:  21 February 2011

W. Roth ,
H.-J. Henkel ,
K.W. Hoffmann  and
H. Markert
W. Roth
Affiliation:
Siemens Research Laboratories, P.O. BOX 3220, D-8520 Erlangen, Federal Republic of Germany
H.-J. Henkel
Affiliation:
Siemens Research Laboratories, P.O. BOX 3220, D-8520 Erlangen, Federal Republic of Germany
K.W. Hoffmann
Affiliation:
Siemens Research Laboratories, P.O. BOX 3220, D-8520 Erlangen, Federal Republic of Germany
H. Markert
Affiliation:
Siemens Research Laboratories, P.O. BOX 3220, D-8520 Erlangen, Federal Republic of Germany
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Abstract

Unsaturated and saturated oligomeric siloxanes were polymerized by laser irradiation in the UV range without the use of photoinitiators. The obtained silicon layers possess high purity and non-corrosive effects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 154: Symposium K – Electronic Packaging Materials Science IV , 1989 , 161
Copyright
Copyright © Materials Research Society 1989

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References

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