Hostname: page-component-7479d7b7d-fwgfc Total loading time: 0 Render date: 2024-07-11T01:20:23.471Z Has data issue: false hasContentIssue false

Magnetic Force Microscopy Imaging of Current Paths

Published online by Cambridge University Press:  11 February 2011

R. Yongsunthon
Affiliation:
Department of Physics, University of Maryland, College Park, MD 20742
A. Stanishevsky
Affiliation:
MRSEC, University of Maryland, College Park, MD 20742
P. J. Rous
Affiliation:
Department of Physics, University of Maryland, Baltimore Country, MD 20742
E. D. Williams
Affiliation:
Department of Physics, University of Maryland, College Park, MD 20742
Get access

Abstract

We demonstrate Magnetic Force Microscopy (MFM) imaging, at room temperature in air, of a 0.25mA DC current path in a 140nm-wide gold nanowire. The nanowire was created by focused ion beam milling of a 12μm wide Cr/Au line of 20nm/110nm Cr/Au thickness. Iterative fitting of the MFM data to an idealized model of the structure yielded a nanowire resistivity a factor of 3.5 higher than that of a control Cr/Au region which was unaffected by the ion beam processing. MFM imaging of an ion-implant patterned line shows current deflection around the implant region.

Type
Research Article
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Yongsunthon, R., McCoy, J., and Williams, E. D., J. Vac. Sci. Technol. 19, 17631768 (2001).Google Scholar
Yongsunthon, R., McCoy, J., and Williams, E. D., ULSI Metrology Conference Proceedings 550, 630634 (2001).Google Scholar
Yongsunthon, R., Stanishevsky, A., McCoy, J., and Williams, E. D., Appl. Phys. Lett. 78, 26612663 (2001).Google Scholar
4. Yongsunthon, R., Rous, P. J., Stanishevsky, A., and Williams, E. D., unpublished.Google Scholar
5. Rous, P. J., Yongsunthon, R., Stanishevsky, A., and Williams, E. D., unpublished.Google Scholar
6. Skidmore, G. D. and Dahlberg, E. D., Appl. Phys. Lett. 71, 32933295 (1997).Google Scholar
7. Schendel, P. J. A. v., Hug, H. J., Stiefel, B., Martin, S., and Guntherodt, H.-J., J. Appl. Phys. 99, 435445 (2000).Google Scholar
8. Larsen, T., Moloni, K., Flack, F., Eriksson, M. A., Lagally, M. G., and Black, C. T., Appl. Phys. Lett. 80, 19961998 (2002).Google Scholar
9. Eames, P., Dahlberg, E. D., and Moloni, K., unpublished.Google Scholar
10. Liebmann, M., Schwarz, A., Langkat, S. M., and Wiesendanger, R., Review of Scientific Instruments 73, 35083514 (2002).Google Scholar
11. Melngailis, J., J. Vac. Sci. Technol. B 5, 469495 (1987).Google Scholar