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Material Properties of Coherent Tin Films
Published online by Cambridge University Press: 15 February 2011
Abstract
In this paper, material properties of low pressure, metallic mode Coherent TiN and poison mode Coherent TiN have been examined. The material properties include resistivity, crystal orientation, stress, lattice spacing, density, texture, atomic composition, bonding, roughness, hydrogen content, and grain size. Various analytical tools have been used to analyze the TiN films.
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- Copyright © Materials Research Society 1995