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Mechanical and Thermophysical Properties of Thin Film Materials for Mems: Techniques and Devices

Published online by Cambridge University Press:  15 February 2011

E. Obermeier
E. Obermeier*
Affiliation:
Technical University of Berlin, Department of Electrical Engineering, Microsensor and Actuator Technology Center, TIB 3.1, Gustav-Meyer-Allee 25, D-13355 Berlin, Germany, oberm@mat.ee.TU-Berlin.DE
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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 39
Copyright
Copyright © Materials Research Society 1997

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