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Microinstrument for the Characterization of Submicron Silicon Fibers at High Strain

Published online by Cambridge University Press:  10 February 2011

J. M. Chen ,
B. W. Reed ,
J. M. Chen ,
B. W. Reed  and
N. C. MacDonald
J. M. Chen
Affiliation:
Applied Physics Department, Cornell University, Ithaca, NY 14853
B. W. Reed
Affiliation:
Applied Physics Department, Cornell University, Ithaca, NY 14853
J. M. Chen
Affiliation:
Applied Physics Department, Cornell University, Ithaca, NY 14853
B. W. Reed
Affiliation:
Applied Physics Department, Cornell University, Ithaca, NY 14853
N. C. MacDonald
Affiliation:
EE Department, Cornell University, Ithaca, NY, 14853
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Abstract

We present a MEMS microinstrument to interface submicron-scale structures and study their properties. Using this microinstrument integrated with a 150nm diameter silicon fiber that has high fracture strength and a high force micro-actuator, the non-linearity of n-type silicon's piezoresistive effect is measured up to the third order, using data from the high strain range of 0-1% for the first time.

Keywords

microinstrumentMEMSpiezoresistancesubmicron silicon
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 13
Copyright
Copyright © Materials Research Society 2000

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References

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