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Microstructural Evolution of Titania Sol-Gel Thin Films

Published online by Cambridge University Press:  21 February 2011

Yongan Yan ,
S. Ray Chaudhuri ,
Din-Guo Chen ,
Barry Bolker  and
Arnab Sarkar
Yongan Yan
Affiliation:
YTC America Inc., 550 Via Alondra, Camarillo, CA 93012
S. Ray Chaudhuri
Affiliation:
YTC America Inc., 550 Via Alondra, Camarillo, CA 93012
Din-Guo Chen
Affiliation:
YTC America Inc., 550 Via Alondra, Camarillo, CA 93012
Barry Bolker
Affiliation:
YTC America Inc., 550 Via Alondra, Camarillo, CA 93012
Arnab Sarkar
Affiliation:
YTC America Inc., 550 Via Alondra, Camarillo, CA 93012
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Abstract

Thin films of crystalline titania with different grain sizes and porosities were prepared by dip-coating on Si (100) substrates starting from a sol-gel process. Three synthesis procedures were developed and compared, using acetylacetone (acac, with HCI) and acetic acid (HOAc) as modifying agents or directly using hydrochloric acid as catalyst. The structural evolution of the films was characterized by Glazing Angle X-ray Diffraction (XRD), Spectroscopic Ellipsometry and Atomic Force Microscopy (AFM). Anatase phase was observed on all of the films calcined at 440° C. The grain sizes and crystallinity generally increased with calcination temperature. Thin films obtained from acac- and HOAc-modified titanium sols had fine grains (50–80 nm) and less porosity (<10%) after calcination at 1000° C. Thin films derived from the sol catalyzed directly with acid had the largest grains (90–130 nm), higher crystallinity and greater porosity (17%).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 346: Symposium N – Better Ceramics Through Chemistry VI , 1994 , 973
Copyright
Copyright © Materials Research Society 1998

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References

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