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Microstructure of Physical Vapour Deposited Ti-Si-N Coatings
Published online by Cambridge University Press: 17 March 2011
Abstract
The influence of Si on the microstrucure of Ti-Si-N coatings was studied, since it controls the mechanical properties of the coatings. At low Si-contents columnar {111}-textured TiN grains form. Increasin the Si-content to >4at% causes a transition to equiaxed {200}-textured TiN grains. The equiaxed TiN grains reveal grain diameters of ∼6 nm for coatings containing 11 at% Si.
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- Copyright © Materials Research Society 2002
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